本論文主要為微型發電機之設計與實作，研究中提出機械能式微發電系統中之電磁感應式微型發電機，並提出其相關之理論數學模型，利用此模型，分析懸臂樑形式發電機的動態與頻率響應特性。結果顯示本研究所提出的第二型彈簧之微發電機在1g加速度下，自然共振頻率為3222 Hz，振幅為26 μm。此外，也提出一磁鐵擺設方式，利用軟體模擬磁場變化，並利用這兩種模擬結果，預估會有約0.4微瓦等級能量之輸出。本論文亦利用一般微機電製程，利用單晶圓完成微發電機之製作，達成有效減少晶片面積並可省去接合製程之訴求。而在量測上，四型彈簧自然共振頻分別為3180 Hz、3387.5 Hz、2700 Hz與724 Hz，在0.0015m/s2加速度下，振幅分別為1.7 nm、3.1 nm、2.38 nm以及13.3nm，與理論值誤差在可接受範圍內。

目錄
致謝 II
目錄 IV
圖目錄 VI
表目錄 IX
第1章 緒論 1
1.1 研究背景與動機 1
1.2 文獻回顧 2
1.2.1. 壓電式發電機 3
1.2.2. 靜電式發電機 3
1.2.3. 電磁式發電機 4
1.3 本文大綱 7
第2章 振動式微型發電機之設計、運作原理與理論模型 8
2.1 振動式微型發電機之設計 8
2.2 振動式微型發電機之運作原理 10
2.3 振動式微型發電機之理論模型 11
2.4 結論 16
第3章 模擬與分析 17
3.1 前言 17
3.2 電磁阻尼 18
3.2.1. 電阻值 (Rc) 18
3.2.2. 有效線圈長度 (Lp) 19
3.2.3. 磁場強度模擬 (B) 20
3.3 質量塊質量 24
3.4 彈簧設計 24
3.4.1. 第一型彈簧 25
3.4.2. 第二型彈簧 28
3.4.3. 第三型彈簧 31
3.4.4. 第四型彈簧 34
3.5 結論 37
第4章 振動式微型發電機製程流程 39
4.1 前言 39
4.2 製程流程 39
4.3 製程結果 42
4.4 結論 47
第5章 實驗結果與討論 48
5.1 前言 48
5.2 實驗架設 48
5.3 量測結果 49
5.4 結果與討論 53
第6章 總結與未來工作 55
6.1 總結 55
6.2 未來工作 56
參考文獻 57

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